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Veléz Sarsfield 201640 Martinez

Buenos Aires

Tel.: +54 (9) 11 5993 8719

Horne Technologies cc

PO Box 536

Betty's Bay, 7141

Tel.: +27 (0)76 563 2084

Building of FAULHABER MINIMOTOR SA, Croglio, Switzerland


Zona Artigianale 8, Madonna del Piano

6980 Croglio

Tel.: +41 (0)91 611 31 00

Building of FAULHABER MICROMO LLC, Wien, Austria


14881 Evergreen Avenue

Clearwater, FL 33762-3008

Tel.: +1 (727) 572 0131

NRC Engineering & Precision Drives Co., Ltd.

17F., No. 890, Jingguo Rd., Luzhu Dist.

Taoyuan City 33858, Taiwan, R.O.C.

Tel.: +886 (0) 3-316-1838

EDEL Teknoloji Sistemleri Sanayi ve Ticaret Ltd.Şti

Folkart TowersAdalet Mah.Manas Blv. No:47B/2809

35530 Bayraklı/İzmir

Tel.: + 90 232 215 08 91

Building of FAULHABER Asia Pacific Pte Ltd., Singapore

FAULHABER Asia Pacific Pte Ltd.

Blk 67 Ubi Road 1, #06-07 Oxley Bizhub

Singapore 408730

Tel.: +65 6562 8270

Compotech Provider AP

Gustavslundsvägen 145, 4 tr

167 51 Bromma

Tel.: +46 (0) 8 441 58 00


56 (bldg. 32), Shosse Enthusiastov

111123 Moscow

Tel.: +7 495 2214 052

Building of FAULHABER Polska sp. z o.o., Poznan, Poland

FAULHABER Polska sp. z o.o.

Ul. Górki 7

60-204 Poznan

Tel.: +48 61 278 72 53

FAULHABER Malaysia Sdn Bhd

1A-2-01 & 02 · One Precinct · Lengkok Mayang Pasir

11950 Bayan Baru · Penang · Malaysia

Tel.: +60 4 619 2570

Swiss Amiet Co., Ltd.

W-903, SK V1 Center, 11 Dangsan-ro 41-g

Yeongdeungpo-gu,07217, Seoul

Tel.: +82 (0) 2 783 4774

Shinkoh Electronics Co., Ltd.

Tokyo Sales Office, Motor Sales Division8F, REID-C OMORI building, 6-20-8

Minami-oi, Shinagawa-ku, Tokyo 140-0013

Tel.: +81 (0) 3 6404 1003

Building of FAULHABER Italia S.r.l., Lomazzo, Italy

FAULHABER Italia S.r.l.

Via Cavour 2

22074 Lomazzo CO

Tel.: +39 0236714708

Inteltek Automation JV

S.No. 100/5, Ambegaon

Pune - 411046

Tel.: +91 (0) 20 39392150

Lewenstein Technologies Ltd.

1 Ha'arava St. Givat Shmuel

5400804 Israel

Tel.: +972 3 9780 800

Electro Mechanical Systems Ltd.

Eros House, Calleva Industrial Park, Aldermaston

Reading, RG7 8LN

Tel.: +44 (0) 118 9817 391

Building of FAULHABER France SAS, Montigny-le-Bretonneux, France


Parc d’activités du Pas du Lac2, Rue Michaël Faraday

78180 Montigny-le-Bretonneux

Tel.: +33 (0) 1 30 80 45 00


Passeig Ferrocarrils Catalans 178

Cornellà de Llobregat 08940 (Barcelona)

Tel.: +34 93 422 70 33


Suokalliontie 9

01740 Vantaa

Tel.: +358 (0) 9 5259 230

Routech s.r.o.

Dr. Milady Horákové 185/66

460 06 Liberec

Tel.: +420 489 202 971

Compower ApS

Marielundvej 29

2730 Herlev

Tel.: +45 (0) 44 92 66 20

Marte Científica e Instrumentação Industrial Ltda

Av Fco Andrade Ribeiro 430

37540-000 Santa Rita do Sapucai, MG

Tel.: +55 (11) 3411 4500

Building of FAULHABER Drive System Technology (Taicang) Co., Ltd.,Taicang, China

FAULHABER Drive System Technology (Taicang) Co., Ltd.

Eastern Block, Incubator Building, No. 6 Beijing Road West

Taicang 215400, Jiangsu Province

Tel.: +86 (0) 512 5337 2626

Building of FAULHABER Benelux B.V., Eindhoven, Netherlands


High Tech Campus 9

5656 AE Eindhoven

Tel.: +31 (0) 40 85155-40

Building of FAULHABER Austria GmbH, Wien, Austria


Modecenterstraße 22/C89

1030 Wien

Tel.: +43 1 7963149-0

ERNTEC Pty. Ltd.

15 Koornang Road

Scoresby, VIC 3179

Tel.: +61 3 9756 4000

Fax: +61 3 9753 4000

Building of Dr. Fritz Faulhaber GmbH & Co. KG, Schönaich, Germany



Faulhaberstraße 1

71101 Schönaich

Tel.: +49 7031 638 0

Fax: +49 7031 638 100

We are sorry

FAULHABER is currently not represented in the selected country.

Please contact us with your request at

Jan-Christopher Mohr

Area Sales Manager

Tel.: +49 (7031) 638 158

Michael Schütte

Area Sales Manager

Tel.: +49 (7031) 638 456

Daniel Brönnimann

Area Sales Manager

Tel.: +41 (0) 79 570 0814

Rolf Leitner

Regional Sales Manager

Tel.: +41 (0) 79 422 3348

Rafael Steinemann

Area Sales Manager

Tel.: +41 (0) 79 932 1645

Brushless motors in drive for the processing of wafers

Today, sensor elements are required in bulk quantities. Cost-effective fabrication is possible only if the fabrication process is more or less fully automated. Many of these mass products are deployed as safety-critical processes, e.g. as ABS sensors, acceleration sensors and others. Hence, quality always has top priority. Until recently, the silicon wafer was manually placed into a carrier and clamped. Only wafers that are accurately positioned can be etched in the subsequent fabrication process. As the wafers already have considerable value at this stage of the manufacturing process, they must be handled with extreme care. Round-the-clock shift operation adds to the overall cost of production.

Quality reigns supreme

Committed to excellence, INGENIA, a handling system expert in electronic production, has developed an automated assembly system designed specially for chip fabrication. In order to address the key issues facing customized manufacturing processes, INGENIA’s product offering has been tailored to the specific requirements of its clients. The demands on handling systems are enormous: in addition to meeting the challenge of three-shift operation, the equipment deployed also has to guarantee safety and exact positioning on a long-term basis. To etch the expensive silicon wafer optimally, it is important that the wafer be inserted into the holder with the utmost precision and then clamped for further processing.
And the demands on handling become even more challenging if sensors or micro-mechanical chips are being fabricated instead of standard ICs. Here, in contrast to the usual memory chips or CPUs, the wafer is processed on both sides. This is the only way of optimally combining the intricate structure of the mechanical elements with the necessary electronics. As there are no handling experts and drive specialists involved in the fabrication plant, the installation and maintenance of the system and its drives must be kept as simple as possible. The objective is to ensure that readjustments and optimization can be undertaken while the system is in operation, or that the system can be started up again after interruptions. Moreover, simple handling is also designed to reduce the operating costs of a system.

Brushless motors in drive for the processing of wafers
A stepping motor ensures the exact alignment of the wafers
Brushless motors in drive for the processing of wafers

Safe insertion

As is the case in every field of automation, the principle of designing highly versatile and adaptable production equipment is of paramount importance. A mix of standard components and special solutions enables optimal handling. The device itself is responsible for handling the full range of processes, from arranging the wafers through mounting the carrier frame right up to transferring the mounted frame. All assembly steps are executed at one level.
There are robot arms for inserting the wafers and storing the wafer inserted in the box. To be able to guarantee safety and exact positioning, as well as CE conformity during power failure, motors with integrated brakes are used in these business-critical machine components. The high basic cycle, as is standard in electronics manufacturing, calls for drives with strong performance and torque. In spite of the high level of dynamics, the positioning must be perfect at all times. The actual process of aligning and clamping the wafer in the holder does not require excessive power, but it is just as critical during the positioning phase. After all, the wafer must lie exactly in the center in order to ensure that as much of the surface as possible is utilized. Finally, the screws of the frame must not only be inserted exactly at the right position, they must also be turned identically so that deviations caused by frame displacement or screw heads that do not sit squarely can be avoided.

Brushless motors in drive for the processing of wafers
Brushless motors in drive for the processing of wafers
Fast & safe – Transportation of carrier frames with the robot arm

Flexible drives

INGENIA uses wear-resistant electronically commutated DC motors in order to meet these demanding requirements. The EC motors developed by the micromotor specialist FAULHABER are the perfect solution, boasting an extensive range of control and gearbox technology. Motors of the 3056 Production Series are ideal for machine components with above-average speed and torque requirements. At a mere 30 mm diameter and 56 mm length, these miniature drives develop a continuous torque of up to 21.5 mNm (stall torque up to 100mNm), at an output power of 49 W. The micromotors are available for supply voltages of 12, 24, 36 or 48 VDC. The speed can be adapted by deploying optional gearheads of the 30/1 or 38/1 Series. The dynamic little powerhouse can be controlled through the micromotor’s analog Hall sensors and MCBL 2805 motion controller, which has been tailored specifically to this state-of-the-art range. The larger motors of the 3564 Type Series can optionally be deployed with integrated motion controllers. This enables a very compact drive of 35 mm diameter and 83 mm total length – including the controller. Despite this compact size, the EC micromotor achieves a power output of 70 W and a peak torque of 160 mNm (continuous torque 50 mNm). Here too, matching gearheads are available to adjust the speed and torque in line with requirements.
In the 3564 K 024 BC model, the electronically commutated servomotor integrates a high-resolution encoder and a programmable motion controller with the help of a high-performance 16-bit controller. Velocity regulation from 10 to 10,000 rpm, velocity profiles such as ramping, triangular, trapezoidal or positioning movements with resolutions up to 1/1000 revolutions are possible. Reference marks and limit switches can also be checked. A self-protection against excess temperature, overloading or excessive voltage during generator operation is integrated. In addition to autonomous deployment, an RS232 interface also enables externally controlled usage. Several motors can operate on one interface by means of addressing. A multiplexer board is available for this purpose.
The interaction of flexible drive concepts and pioneering system solutions also provide a solid foundation for reduced production costs in electronic fabrication, while simultaneously improving manufacturing quality. State-of-the-art drive solutions ensure fast and safe handling at all times.


3056 ... B

2 Pole Technology

Data sheet (PDF) Product details

3564 ... B

2 Pole Technology

Data sheet (PDF) Product details

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