Miniaturization is much in demand. Whether in the field of electronics, mechanical engineering or biology, high demands have to be met in terms of dimensional accuracy of ultra-miniature structures in particular. To be able to measure structures in the sub-micrometer range reliable, specialist know how is essential; simply adopting a downsized standard solution from the „big world“ is not an option. Linear positioners, permitting tiny increments beneath a measuring probe by means of piezo actuators, have been a tried and proven method for a long time. They do a reliable job even in the nanometer range. One of the disadvantages of them, though, is the low dynamism of their drives and their limited feed length. A patented system comprising a fast DC drive in combination with a high-precision piezo rotary drive mounted on a common spindle has provided a solution to this dilemma. Rapid delivery to the measurement point, then minimal feed rate for maximum resolution over long positioning distances is no longer a problem.
Ultra-fine motion control in the production of high-purity crystals and in focusing, scanning, adjustment, inspection and measurement tasks in the sub-μm range demands highly accurate, reproducible movements. The conventional approach to this is to run the object being measured past a measuring probe or actuator on a linear positioner. Piezo drives are known for their capacity to deliver ultra-fine stepwidths, but unfortunately their dynamism is insufficient to transport the payload into the work area. The traditional solution too – by which these very low speeds are attained at very low resolutions based on multi-stage, wide-stepped, play-free reduction gearing – means minutes of approach work to reach the measuring position. But long setup times cost money. Precision movement specialist Feinmess Dresden GmbH has now come up with a patented solution for this dilemma. The fast non-precision transport is provided by a geared DC drive, with the fine adjustment then being handled by a highprecision piezo motor. In cooperation with FAULHABER, the drives were optimized to perform this combination of tasks in harmony.